The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages
نویسندگان
چکیده
This paper presents the effect of the accuracies of flexure hinge compliance equations (the accuracies vary with a geometrical ratio, t/R of a hinge) on the output compliances of RRR and 3-RRR micro-motion stages. Closed-form output compliance models of the stages are derived (with flexure hinge compliances as one of the variables) to investigate the aforementioned effect. The output compliances, calculated using various flexure hinge equations, are compared to that of the finite element analysis (FEA) and the results are discussed. Crown Copyright 2007 Published by Elsevier Ltd. All rights reserved.
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